Silicon product

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MEMS

Kodenshi has accumulated experiences for development on optical semiconductor for many years. We have handled Solid processing (MEMS) of silicon, and achieved to release some products into the market.
We can offer various specifications for a solid processing of silicon, basing on the experience for customized specifications to meet the demand of the customers.
The features of MEMS technology by Kodenshi are as follows;
(1)V ditch processing accuracy 1.0μm or less
(2)Possession of "Dry etching technology" and "Wet etching technology"
and the compound technology of "Dry wet etching for silicon crystal unisometric etching technology.
We are well prepared by these technologies corresponding to various demands of the customers!

■Solid processing technology of silicon substrate

  • Consistent development production system from "Micro machining tech." to "Electrode formation tech."
  • Possession of "Dry etching technology" and "Wet etching technology"
  • The compound technology of "Dry wet etching".
  • V ditch processing accuracy 1.0μm or less

■MEMS technology of Kodenshi

Capabilities Under development Applications
Silicon crystal unisometric etching technology   SiOB and optical pass
Silicon dry etching technology   Micro TAS and micro machining
Silicon wet etching technology   Micro TAS and micro machining
Silicon dry wet etching compound technology   Micro TAS and micro machining
Diamond Fullum formation technology   Flow sensor and pressure sensor
  The silicon glass joint technology Various sensors
  Technology of process of the glass Electrostatic capacity sensor and flow cell
  Minute electroformed processing technology Minute metal mold
  Minute reproduction molding technology Optical pass and lens for optical communication

■Execution example

Execution exampleExecution exampleExecution example

The MEMS technology of Kodenshi is made the best use of in customer's specification. Please do not hesitate to inquire details.
You will find a KODENSHI MEMS technology that is really close to what you are looking for.To find out more about KODENSHI custom product development capabilities,please contact us.KODENSHI is always at your service.

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